MPS R400DS state-of-the-art grinding technologies

The MPS R400 line of machines have been designed to take advantage of state-of-the-art grinding technologies and ergonomics. The fully encapsulated grinding area offers optimum environmental conditions for the operator and reduces risks of contamination. This concept has been developed and refined for maximum precision when grinding metals, silicon and other semiconductor materials in small batch production, research and development.

Application

The major application is the grinding of silicon and GaAs in the 50 mm up to 150 mm range.

Features

Pictures

MPS 2 R400DS
VACUUMCLAMPING
TWIN-SPINDLE

Special Option: MPS 2 R400DS + TWIN-SPINDLE

The TWIN-SPINDLE concept shows several oppurtunities:

Technical Data

Motor 3,7 kW
Spindle speed 2850 min-1
Power connection 5,5 kW
Accuracy 2 µm
Diamond wheel 200 x 34 x 76 mm
Rotary table 400 mm
Rotary table speed 0-30 min-1
Vakuum chucks 28 x 2" ; 16 x 3"; 8 x 4"; 5 x 5"; 4 x 6"
Fine downfeed  
Range 170 mm
min. Step 1 µm
Weight 980 kg
Space ca. 1550 x 1130 mm