MPS 2 R300DCS automatic vertical high precision surface grinder
Fully automatic vertical high precision surface grinder with rotary table and vacuum chucks.This high precision surface grinder is a further development of the well-known MPS 2 R300-series.
Application
Rough and finish grinding of silicon, GaAs, sapphire and other semi-conductor materials at highest flatness accuracy.
Features
Fully enclosed grinding area for optimal working comfort and security - no contamination.
Automatic downfeed system by four phase stepping motor, infinitely variable downfeed speed.
Gauging unit (optional device) enables compensation of wheel wear and thermal effects - minimal thickness variation values.
Pictures
- MPS R300DCS
- Grinding aera
Technical Data
| Motor | 2,2 kW |
| Spindle speed | 2650 min-1 |
| Power connection | 3,2 kW |
| Precision | 3 µm |
| Diamond grinding wheel | 175 x 40 x 76 mm |
| Rotary table | 300 mm |
| Rotary table speed | 0-30 min-1 |
| Vakuum chucks | 18 x 2" ; 8 x 3"; 5 x 4"; 3 x 5";2 x 6"00 mm |
| Fine downfeed | |
| range | 12 mm |
| min. step | 1 µm |
| Coolant tank | 35 l |
| Weight | 780 kg |
| Space | ca. 1400 x 930 mm |